MicroE Systems Mercury 1000 Manual de usuario descargar pdf (Pagina 5)

Mechanical Information - Sensor

or 78.7 [2000] ±.50 [12.7]

19.7 [500] or 39.4 [1000]

.142 [3.61]

CABLE DIAMETER

1.47.058

4.22.166

6.91.272

0.94.037

3.4.13

SENSOR MTG SURFACE

2.03.080

16.5.650

2.11.083

3.94.155

8.5.334

12.70.500

10.29.405

20.57.810

THRU.

2.69.106

8.75.345

6.2.24

All Specifications are subject to change. All data is

accurate to the best of our knowledge. MicroE

Systems is not responsible for errors.

Page 5 of 10

System Specifications

System

Grating Period 20µm

Signal Period 20µm

System Resolution 5µm - 0.020µm in integer interpolation steps (factory set or user

programmed using MicroE SmartPrecision Software)

Linear accuracy*

Interpolation

accuracy: Better than ± 0.12µm over any 20µm movement

Long-travel

accuracy: ±1µm accuracy available - consult MicroE

Better than ± 3µm for scales up to 130mm

Better than ±5µm for scales 155mm to 1m

Better than ±5µm per meter for scales 1m or more

*Maximum peak to peak error over the specified movement when compared to a NIST-traceable laser interferometer standard, used

at room temperature and with MicroE interpolation electronics.

Rotary Accuracy* Scale O.D. Microradians Arc-Seconds

12.00mm ±100 ±21

19.05mm ±63 ±13

31.75mm ±38 ±7.8

57.15mm ±19 ±3.9

107.95mm ±10 ±2.1

*Based on ideal scale mounting concentricity

Sensor Size

W: 12.70mm 0.500"

L: 20.57mm 0.810"

H: 8.38mm 0.330"

Operating and Electrical Specifications

Power Supply 5VDC ±5% @ 330mA (30mA for sensor)

Temperature

Operating: 0 to 70°C

Storage: -20 to 70°C

Humidity: 10 - 90% RH non-condensing

EMI: CE Compliant

Shock: 1500G 0.5 ms half sine (Sensor)

Sensor Weight: 5.0g (Sensor without cable)

Cable: Double Shield. Maximum length 2m. Diameter: 3.6mm (0.142”)

Flex Life: 20 x 10

cycles @ 20mm bending radius

SENSOR MTG. SURFACE

1 2 3 4 5 6 7 8 9 10

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